1 PCS used COMDEL CDX-2000 (FP5325R1) RF Power Supply #LYQ007
Parameter
Details
Model
CDX-2000
Part Number
FP5325R1
Type
Dual Frequency RF Generator
Application
Plasma processes (etch, deposition, bias, ashing) in semiconductor & solar equipment
Parameter
Specification
Input Voltage
115 / 230 VAC (universal auto-ranging)
Input Frequency
50 / 60 Hz
Input Phase
Single-phase
Efficiency
>95%
Parameter
Specification
Frequency
13.56 MHz (fixed)
Output Power
0–1000 W (continuous forward power)
Load Impedance
50 Ω (coaxial/matching network)
Reflected Power Limit
≤200 W (power tracking valid)
Power Accuracy
±3.0% of setpoint (10–100% full power)
Isolation (LF–HF)
≥50 dB
Parameter
Specification
Frequency
400 kHz (fixed)
Output Power
0–1000 W (continuous forward power)
Load Type
LC parallel resonant (inductively coupled plasma)
Reflected Power Limit
≤200 W (power tracking valid)
Power Accuracy
±3.0% of setpoint (10–100% full power)
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