1 PCS used AMAT 0190-38451 COMET RF Match #LYQ007
1 PCS used AMAT 0190-38451 COMET RF Match #LYQ007
| Parameter | Specification | Unit |
|---|---|---|
| Manufacturer | COMET (for Applied Materials, AMAT) | - |
| AMAT Part Number | 0190-38451 | - |
| COMET Model | 20033325 | - |
| Operating Frequency | 13.56 | MHz |
| Maximum RF Voltage | 3500 | Vrms |
| Input Power Supply | 200-240 | VAC |
| Input Power | 3.5 | kVA |
| Input Frequency | 50/60 | Hz |
| Input Current | 20 | A |
| System Impedance | 50 | Ω |
| Cooling Method | Forced Air (Dual Fans) | - |
| Weight | 7.7 | kg |
| Protection | Over-voltage, Over-current, Over-temperature | - |
| Application | Semiconductor Plasma Processing (Etch, Deposition) | - |
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