1 PCS used MKS VODMC13CR1BE (3930-00082B) Vapor On Demand Module#LYQ007
Parameter
Details
Model
VODMC13CR1BE (P/N: 3930-00082B)
Product Type
Vapor On Demand Module (VoDM-C)
Intended Use
Water vapor generation & flow control (no carrier gas)
Flow Range
100 sccm ~ 1 slm (1000 sccm) full scale
Flow Accuracy
±3.0% of full scale
Flow Repeatability
±0.2% of full scale
Flow Resolution
0.1% of full scale
Output Noise
±1.00% peak-to-peak (full scale)
Warm-up Time
3 hours (minimum for stabilization)
Parameter
Details
Ambient Temp
15°C ~ 45°C (59°F ~ 113°F)
Storage Temp
-20°C ~ 80°C (-4°F ~ 176°F)
Storage Humidity
0 ~ 95% RH (non-condensing)
Max Altitude
2000 m
Internal Pressure
Max 2000 Torr
Overpressure Limit
100 psia
Water Supply
20 ~ 40 psig, de-ionized, filtered ≤1 μm
Parameter
Details
Vaporizer Temp
140°C ±10°C (factory set)
Flow Control Body
125°C (factory set)
Outlet Line
Must be heated to ≥100°C (prevent condensation)
Thermal Safety
Shutdown at >210°C
Parameter
Details
Power Input
100/120/220/240 VAC, 48 ~ 62 Hz
Power Consumption
Max 330 VA
Fuse Ratings
4.0A (100/120V); 1.6A (220/240V), 250V
Analog I/O
0 ~ 5 VDC (flow/setpoint); 0 ~ 10 VDC (pressure)
Max Cable Length
100 feet (signal output)
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