1 PCS used MKS EDGE30R40A-G15 REV.D RF Generator #LYQ007
1 PCS used MKS EDGE30R40A-G15 REV.D RF Generator #LYQ007
Model: EDGE30R40A-G15 REV.D
Part Number: 660-260960-005
Description: 30kW, 400kHz RF Power Supply
| Parameter | Details |
|---|---|
| Frequency Range | 400 kHz (Fixed) |
| Output Power | 30 kW (Continuous, Nominal) |
| Input Voltage | 3-Phase, 200-208V AC, 50/60 Hz |
| Cooling | Water-Cooled |
| Control Interface | Analog & Digital (RS-232, Ethernet) |
| Protection | Over Voltage, Over Current, Over Temperature, VSWR, Interlock |
| Compliance | CE, SEMI S2 |
| Parameter | Min | Nom | Max | Unit |
|---|---|---|---|---|
| Power Rating | — | 30 | — | kW |
| Frequency | — | 400 | — | kHz |
| Output Voltage | — | — | 8000 | V (peak) |
| Output Current | — | — | 100 | A (peak) |
| Impedance Range | 5 | — | 1000 | Ohms |
| Power Stability | ±0.5 | — | — | % of setpoint |
| Rise/Fall Time | — | <100 | — | µs |
| Parameter | Min | Nom | Max | Unit |
|---|---|---|---|---|
| Line Voltage | 190 | 200-208 | 220 | V AC (3-phase) |
| Line Frequency | 47 | 50/60 | 63 | Hz |
| Input Current | — | — | 120 | A (per phase) |
| Power Factor | >0.95 | — | — | — |
| Efficiency | >85 | — | — | % |
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