1 PCS used AMAT 0010-23685 REV.003 RF Match #LYQ007
1 PCS used AMAT 0010-23685 REV.003 RF Match #LYQ007
| Parameter | Value |
|---|---|
| Part Number | 0010-23685 |
| Revision | 003 |
| Manufacturer | Applied Materials (AMAT) |
| Description | Auto-Tuning RF Match Assembly (Semiconductor Process) |
| Operating Frequency | 13.56 MHz (ISM Standard) |
| Power Rating | Up to 5 kW (Forward) |
| Control Type | Closed-Loop Auto-Match (V/I Sensor Based) |
| Actuation | Dual Stepper Motor (Variable Capacitors) |
| Communication | RS-485 / DeviceNet |
| Impedance Range | 0.5 – 100 Ω (Load Side) |
| VSWR | ≤ 1.1:1 (Typ. After Tuning) |
| Tuning Speed | < 200 ms (Typ.) |
| Operating Temp | 0°C to +55°C |
| Cooling | Air-Cooled |
| Enclosure | Sealed Metal, Cleanroom Class 1 Compatible |
| Certifications | CE, FCC, RoHS, SEMI S2/S8 |
| Input Voltage | 24 VDC ± 10% |
| Current Draw | < 3 A (Max) |
| Weight | Approx. 12 kg |
| Dimensions (W×D×H) | 432 × 356 × 178 mm |
| Applications | Etch, PVD, CVD Chambers |
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