1 PCS used AMAT 0090-09508V01 Chamber Controller #LYQ007
1 PCS used AMAT 0090-09508V01 Chamber Controller #LYQ007
| Parameter | Value |
|---|---|
| Part Number | 0090-09508 Rev 01 |
| Product Type | Chamber System Controller Module |
| Compatible Platforms | Centura, Endura, Producer Series Semiconductor Systems |
| Power Input | 24 VDC (Nominal), 18–36 VDC (Range) |
| Power Consumption | Max. 8.5 W (Non-Redundant) |
| Processor | High-Performance Embedded CPU |
| Memory | 16 MB SDRAM, 32 MB Flash |
| I/O Interface | Multi-Channel Analog & Digital Mixed I/O |
| Analog Input | 0–10 V, 4–20 mA |
| Analog Output | 0–10 V, 4–20 mA, PWM |
| Digital I/O | Isolated Digital Inputs / Relay Outputs |
| Sensor Inputs | Thermocouple, RTD, Pressure Transducers |
| Communication | RS-485, Ethernet, SECS/GEM Support |
| Operating Temp | 0°C to +60°C (32°F to 140°F) |
| Dimensions | 147 mm x 51.5 mm x 114 mm |
| Weight | 0.6 kg (Net), 1.5 kg (Shipping) |
| Isolation | Galvanic Isolation (Signal & Power) |
| Protection | Over-Voltage, Over-Current, Over-Temperature |
| Application | Chamber Pressure/Temp Control, Gas Flow Control |
| Certifications | CE, SEMI S2/S8 Compliant |
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