1 PCS AE RF Navigator 1013 (P/N 3155126-020)#LYQ007
1 PCS AE RF Navigator 1013 (P/N 3155126-020)#LYQ007
| Parameter Category | Parameter | Specification |
|---|---|---|
| General | Model Number | 1013 (Navigator 1013) |
| Part Number | 3155126-020 | |
| Manufacturer | Advanced Energy (AE) | |
| Type | RF Automatic Matching Network | |
| Electrical | Nominal Frequency Range | 13.56 MHz (±5% typical) |
| Power Handling Capability | Up to 400 W (typical, application-dependent) | |
| Input Voltage | Dependent on host system / RF Generator | |
| Impedance Range | 50 Ω system (standard); automatic matching via motor-driven tuners | |
| Mechanical | Weight | Approx. 6.0 kg (typical for Navigator 1013 series) |
| Form Factor | Chassis-mount (chamber-mounted design) | |
| Dimensions | Customary to chamber integration (refer to mechanical drawing for exact LxWxH) | |
| Control & Interface | Control Interface | RS-232 (standard); optional networking for system integration |
| Tuning Mechanism | Microprocessor-controlled stepper motor drives | |
| Features | Fast, automated matching; real-time impedance monitoring (optional Z’Scan II) | |
| Certifications & Standards | Safety & Compliance | CE, IEC, UL (per regional application standards) |
| Application Focus | Semiconductor Etch, PECVD, PVD, Chamber Clean processes |
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