1 PCS used COMET RF Match Network AMAT 0190-40238 #LYQ007
1 PCS used COMET RF Match Network AMAT 0190-40238 #LYQ007
| Parameter | Value |
|---|---|
| Manufacturer | COMET (for Applied Materials / AMAT) |
| AMAT Part Number | 0190-40238 |
| Model | AutoMatch RF Matching Network |
| Frequency Range | 13.56 MHz (fixed) |
| Max. RF Power | 3000 Watts (3 kW) |
| Input Impedance | 50 Ω (standard) |
| Max. RF Voltage | 3500 VRMS |
| Max. Current | 50 Amps |
| Control Interface | Analog + Digital (RS-232 / DeviceNet compatible) |
| Supply Voltage | 200–240 VAC, 50/60 Hz, single phase |
| Power Consumption | < 500 W (idle) |
| Cooling | Forced air (dual fans) |
| Operating Temp. | 0–45 °C |
| Humidity | 10–80% RH (non-condensing) |
| Dimensions (W×D×H) | 483 × 450 × 132 mm (19" rack mount) |
| Weight | approx. 15.0 kg |
| Protection | Over-voltage, over-current, over-temperature, VSWR trip |
| Match Time | < 100 ms (typical) |
| VSWR | < 1.1:1 (matched condition) |
| Certifications | CE, SEMI S2 |
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