1 PCS used AE ADVANCED ENERGY Z'Scan Power Controller 3155163-001 #LYQ007
1 PCS used AE ADVANCED ENERGY Z'Scan Power Controller 3155163-001 #LYQ007
| Parameter | Value |
|---|---|
| Product Name | RF Z'Scan Power Controller / RF Impedance Probe |
| Manufacturer | Advanced Energy (AE) |
| Part Number | 3155163-001 |
| Measurement Range | 32 kW dynamic power range |
| Measurement Parameters | Measures 14 critical RF process parameters at the load |
| Function | Non-intrusive RF-sensing system for real-time measurement of power and impedance under actual process conditions |
| Application | Semiconductor plasma processes, RF power delivery monitoring |
| Type | Z'Scan series RF navigator/match network controller |
| Condition | Industrial-grade, typically used in semiconductor manufacturing equipment |
| Features | Real-time process monitoring, accurate impedance measurement, non-intrusive design |
| Usage | Installed in RF power delivery systems for plasma etching, deposition, and related semiconductor fabrication steps |
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