1 PCS used Edwards STP-A803CV100 Turbomolecular Pump #LYQ007
1 PCS used Edwards STP-A803CV100 Turbomolecular Pump #LYQ007
| Parameter | Details |
|---|---|
| Model | STP-A803CV100 |
| Type | Magnetically Levitated (Maglev) Turbomolecular Pump |
| Pumping Speed (N₂) | 800 L/s |
| Pumping Speed (H₂) | 520 L/s |
| Compression Ratio (N₂) | > 10⁸ |
| Compression Ratio (H₂) | > 10³ |
| Ultimate Pressure | < 10⁻⁷ Pa (10⁻⁹ Torr) |
| Max. Continuous Backing Pressure | 270 Pa (2 Torr) |
| Max. Throughput (N₂) | 1500 sccm (2.53 Pa·m³/s) |
| Nominal Rotational Speed | 32,500 rpm |
| Motor Power | 0.85 kW |
| Power Supply | 200–240 V, 50/60 Hz |
| Max. Power Consumption | 850 VA (without TMS) / 1200 VA (with TMS) |
| Inlet Flange | ISO160F |
| Exhaust Flange | KF40 |
| Purge Port | KF10 |
| Cooling Water Connection | PT 1/4 |
| Cooling Method | Water-cooled / Forced Air-cooled / Natural Air-cooled |
| Start-up Time | Approx. 7 minutes |
| Stop Time | Approx. 8 minutes |
| Mounting Orientation | Free |
| Weight | Approx. 39 kg (with TMS) |
| Control Unit | SCU-800 / SCU-801 |
| Features | Corrosion-resistant (CV), with TMS (Temperature Management System) |
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