1 PCS used AMAT Varian E11303640 controller #LYQ007
Parameter
Value
Part Number
E11303640
Brand / OEM
Varian Semiconductor (Applied Materials, AMAT)
Product Type
Ion Implanter System Controller Module
Application
For Varian VIISta / 300XP / 400XP series high-current ion implanters
Function
Beam control / Process control / System logic control
Parameter
Specification
Input Voltage
24 V DC (nominal, redundant)
Power Consumption
≤ 8.5 W (non-fault-tolerant)
Control Core
32-bit RISC processor + FPU
Control Algorithms
PID, cascade, feedforward, closed-loop beam control
Memory
16 MB SDRAM, 32 MB Flash
Operating Temp
0 °C to +60 °C (32 °F to 140 °F)
Communication
Ethernet 10/100 Mbps, RS-232/485, USB 2.0
Protocols
Modbus TCP/RTU, EtherNet/IP, OPC UA
Dimensions
14.7 cm × 5.15 cm × 11.4 cm
Weight
approx. 0.6 kg
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