1 PCS used Lam 27-317157-00, AE RF Match #LYQ007
1 PCS used Lam 27-317157-00, AE RF Match #LYQ007
| Parameter | Value |
|---|---|
| Part Number | 27-317157-00 |
| Manufacturer | Advanced Energy (AE) for Lam Research |
| Product Type | Automatic RF Impedance Match |
| Frequency Range | 13.56 MHz (nominal) |
| Power Rating | Up to 10 kW CW |
| Impedance Matching Range | 50 Ω source, variable load (typical plasma) |
| Control Interface | Analog + Remote I/O |
| Cooling | Air / Forced Air |
| Input Connector | N-type (female) |
| Output Connector | N-type (female) or hardwire |
| Voltage | 208–240 VAC, 1φ, 50/60 Hz |
| Dimensions (W×D×H) | Approx. 430 × 280 × 200 mm |
| Weight | Approx. 15 kg |
| Application | Semiconductor plasma etch/deposition (Lam platforms) |
| Features | Auto-tuning, fast match time, low reflection |
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