1 PCS USED MKS DPCA-26028 Pressure Controller #LYQ007
1 PCS USED MKS DPCA-26028 Pressure Controller #LYQ007
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Parameter
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Specification
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Unit
|
Notes
|
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Product Name
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Pressure Controller
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-
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Genuine MKS Original Product
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Part Number
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DPCA-26028
|
-
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Original Factory Part Number, Non-Replacement
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Brand
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MKS
|
-
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Professional Pressure Control & Measurement Equipment Manufacturer
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Product Type
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Dual-Zone Pressure Controller
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-
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Highly Integrated Closed-Loop Pressure Control Subsystem
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Control Method
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Absolute Pressure Capacitance Manometer
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-
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Consists of Pressure Sensor, Control Valve & Mass Flow Meter
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Parameter
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Min
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Typ
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Max
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Unit
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Notes
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Pressure Range
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10
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50
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100
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Torr
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Optional Ranges: 10/20/50/100 Torr
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Pressure Control Accuracy
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-
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±0.5
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-
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% of rdg.
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High Precision Closed-Loop Control
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Set Point Stability
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-
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≤0.1
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-
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% of set point
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Stable Control Performance
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Control Time to Set Point
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-
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≤2.0
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-
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sec
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Typical Value, Fast Response
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Transducer Over Pressure Limit
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-
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45
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-
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psia
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Or 200% Full Scale, Whichever Is Greater
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|
Maximum Inlet Pressure
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-
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45
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-
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psia
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Stable Inlet Pressure Adaptation
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|
Parameter
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Min
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Typ
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Max
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Unit
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Notes
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|
Flow Measurement Range
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10
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50
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100
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sccm
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Optional Ranges: 10/20/50/100 sccm
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Flow Accuracy
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-
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±1.0
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-
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% of F.S.
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Precise Mass Flow Metering
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Zero Temp Coefficient (Pressure)
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-
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≤0.02
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-
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% F.S./℃
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Low Temperature Drift
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Zero Temp Coefficient (Flow)
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-
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≤0.05
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-
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% F.S./℃
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Low Temperature Drift
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Span Temp Coefficient (Pressure)
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-
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≤0.04
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-
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% rdg./℃
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Stable Span Performance
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