1 PCS used Lam RF Power Supply 853-258768-004 #LYQ007
1 PCS used Lam RF Power Supply 853-258768-004 #LYQ007
| Parameter | Value |
|---|---|
| Part Number | 853-258768-004 |
| Manufacturer | Lam Research |
| Type | RF Generator (Power Supply) |
| Frequency | 13.56 MHz (Industrial, Scientific, Medical band) |
| Output Power | 3000 W (3 kW) Nominal, Adjustable |
| Input Voltage | 200-208 V, 3-Phase, 50/60 Hz |
| Impedance | 50 Ohms |
| Control Interface | Analog & Digital (RS-232/DeviceNet) |
| Cooling | Forced Air Cooling |
| Protection | Over Power, Over Voltage, Over Temperature, VSWR |
| Dimensions (H x W x D) | 26.67 cm x 48.26 cm x 60.96 cm (10.5" x 19" x 24") |
| Weight | Approx. 27.2 kg (60 lbs) |
| Application | Semiconductor Etch & Deposition Processes |
1 .Our company specializes in automation industrial control accessories. We have more than 100,000 products.
Including : frequency converter, servo driver, servo motor, data acquisition card, industrial camera, touch screen, circuit board, DCS module, soft starter, industrial computer,encoder... etc
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