1 PCS new MKS GE50A013302R5V020 Digital Mass Flow Controller #LYQ007
1 PCS new MKS GE50A013302R5V020 Digital Mass Flow Controller #LYQ007
| Parameter | Specification |
|---|---|
| Model | GE50A013302R5V020 |
| Product Type | Digital Mass Flow Controller (MFC) |
| Calibration Gas | Nitrogen (N₂) – Code 013MKS |
| Full Scale Flow Range | 3000 sccm (N₂ equivalent) – Code 302MKS |
| Control Range | 2% to 100% of Full ScaleMKS |
| Typical Accuracy (N₂) | ±1% of Reading (20–100% FS); ±0.2% of Full Scale (2–20% FS)MKS |
| Repeatability | ±0.3% of ReadingMKS |
| Resolution | 0.1% of Full ScaleMKS |
| Normal Operating Pressure Differential | 10–40 psid (atmospheric outlet)MKS |
| Maximum Inlet Pressure | 150 psigMKS |
| Proof Pressure | 1000 psigMKS |
| Burst Pressure | 1500 psigMKS |
| Zero Temperature Coefficient | <0.05% of Full Scale/°CMKS |
| Span Temperature Coefficient | <0.08% of Reading/°CMKS |
| Inlet Pressure Coefficient | <0.02% of Reading/psiMKS |
| Warm-up Time | <30 min (to ±0.2% FS steady state)MKS |
| Typical Settling Time | <750 msec (above 5% FS, SEMI E-17-0600)MKS |
| Operating Temperature | 10°C to 50°C (ambient)MKS |
| Storage Temperature | -20°C to 80°CMKS |
| Storage Humidity | 0–95% RH, non-condensingMKS |
| Fitting Type | Swagelok 4 VCR male – Code RMKS |
| I/O Interface | RS485 (9-pin D-sub) – Code 5MKS |
| Seal Material | Viton® – Code VMKS |
| Valve Type | Normally Closed – Code 0MKS |
| Wetted Materials | 316L SS VAR, 316 SS, Elgiloy®, NickelMKS |
| External Leak Integrity | <1 × 10⁻⁹ scc/sec HeMKS |
| Input Power | +15 to +24 VDC, <4 wattsMKS |
| Weight | <3 lbs (1.4 kg)MKS |
| Compliance | CEMKS |
1 .Our company specializes in automation industrial control accessories. We have more than 100,000 products.
Including : frequency converter, servo driver, servo motor, data acquisition card, industrial camera, touch screen, circuit board, DCS module, soft starter, industrial computer,encoder... etc
2，We accept PayPal transaction. All products provided 60 days warranty. We can send the goods by fast express to all over world.
3. We can supply the product in brand new or used condition to meet your requirement.The picture and price show on our store is not real, before purchasing, please contact us to provide you with accurate quotation and real pictures.
4. If you can not find the product you need in our store, please contact us .we will check it for you.