1 PCS NEW MKS GE50A004103R5V020 Mass Flow Controller #LYQ007
1 PCS NEW MKS GE50A004103R5V020 Mass Flow Controller #LYQ007
| Parameter | Value |
|---|---|
| Model | GE50A004103R5V020 |
| Type | Digital Mass Flow Controller (MFC) |
| Calibration Gas | Nitrogen (N₂, code 004)MKS |
| Full Scale Flow | 1000 sccm (code 103)MKS |
| Control Range | 2% – 100% of Full ScaleMKS |
| Accuracy (N₂) | ±1% of Reading (20–100% FS); ±0.2% of FS (2–20% FS)MKS |
| Repeatability | ±0.3% of ReadingMKS |
| Resolution | 0.1% of Full ScaleMKS |
| Zero Temp Coefficient | <0.05% of FS/°CMKS |
| Span Temp Coefficient | <0.08% of Reading/°CMKS |
| Inlet Pressure Coefficient | <0.02% of Reading/psiMKS |
| Warm-up Time | <30 min (to ±0.2% FS steady state)MKS |
| Settling Time | <750 msec (above 5% FS, SEMI E-17-0600)MKS |
| Max Inlet Pressure | 150 psigMKS |
| Operating Pressure Drop | 10–40 psid (10–5000 sccm, outlet at atm)MKS |
| Proof Pressure | 1000 psigMKS |
| Burst Pressure | 1500 psigMKS |
| Operating Temp | 10°C to 50°CMKS |
| Storage Temp | -20°C to 80°CMKS |
| Storage Humidity | 0–95% RH, non-condensingMKS |
| Leak Integrity (External) | <1×10⁻⁹ scc/sec HeMKS |
| Leak (Closed Valve) | <0.1% FS at 40 psig to atmMKS |
| Wetted Materials | 316L SS VAR, 316 SS, Elgiloy®, NickelMKS |
| Seal Material | Viton® (code V)MKS |
| Surface Finish | 16 μin Ra averageMKS |
| Weight | <3 lbs (1.4 kg)MKS |
| Fitting | Swagelok® 4 VCR® male (code R)MKS |
| Communication | RS485 (9‑pin D‑sub, code 5)MKS |
| Valve Type | Normally Closed (code 0)MKS |
| Input Power | +15 to +24 VDC, <4 WMKS |
| Compliance | CE, RoHSMKS |
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