1 PCS used Mattson Ripple Rack Helios LPR Con troller 170002075 4768745700.0006 #LYQ007
1 PCS used Mattson Ripple Rack Helios LPR Con troller 170002075 4768745700.0006 #LYQ007
| Parameter | Value |
|---|---|
| Product Model | Mattson Ripple Rack Helios LPR Controller |
| Serial Number | 4768745700.0006 |
| Type | Rapid Thermal Processing (RTP) System Controller |
| Application | For Helios Series RTP Systems (Semiconductor Wafer Annealing) |
| Control Function | Lamp Power Regulation (LPR), Temperature Ramp/Soak Control |
| Temperature Control Range | 200°C to 1300°C |
| Ramp Rate Capability | Up to >150°C/sec (system-dependent) |
| Control Interface | Multi-channel analog & digital I/O, Ethernet |
| Input Power | 200–240 VAC, 3-phase, 50/60 Hz |
| Control Channels | Multi-zone lamp heating control |
| Communication | SECS/GEM, Ethernet/IP, RS-232 |
| Mounting | Ripple Rack (Modular Industrial Rack Mount) |
| Software Version | Helios RTP System Firmware (Revision Dependent) |
| Features | Programmable ramp/soak profiles, multi-point temperature readback, chamber pressure & O₂ monitoring |
| Ambient Control | O₂ < 1 ppm process purity capability |
| Safety Interlocks | Over-temperature, door interlock, emergency stop |
| Dimensions | Standard 19" rack, 6U–12U height (config-dependent) |
| Weight | Approx. 25–35 kg |
| Certifications | CE, SEMI S2, NFPA 79 |
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