1 PCS used AMAT 0040-08452 REV 002 Vectra IMP Source RF Match #LYQ007
1 PCS used AMAT 0040-08452 REV 002 Vectra IMP Source RF Match #LYQ007
| Parameter | Value |
|---|---|
| Part Number | 0040-08452 |
| Revision | 002 |
| Description | Vectra IMP Source RF Match Assembly |
| Frequency Range | 13.56 MHz (nominal) |
| Power Rating | Up to 5 kW (forward) |
| Impedance Range | 50 Ω source, variable load matching |
| Control Interface | Analog (0-10 VDC) / Digital (RS-232) |
| Operating Voltage | 208 VAC, 3Φ, 50/60 Hz |
| Reflected Power | < 1% (typical at match) |
| Tuning Speed | < 100 ms (full range) |
| Cooling | Forced Air |
| Dimensions (W x D x H) | 432 x 559 x 229 mm (17" x 22" x 9") |
| Weight | 22.7 kg (50 lbs) |
| Environmental | Temp: 0-40°C, Humidity: 10-90% non-condensing |
| Application | Vectra IMP Ion Implanter Source Chamber |
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