1 PCS used Lam Research 853-031341-001 Module#LYQ007
1 PCS used Lam Research 853-031341-001 Module#LYQ007
| Parameter | Value |
|---|---|
| Part Number | 853-031341-001 |
| OEM | Lam Research Corporation |
| Product Type | Precision Mechanical / Pneumatic Module |
| Description | ASSY, VACUUM, BLOCK, FRU (Field Replaceable Unit) |
| Application | Semiconductor Etch Equipment (Autoetch 490 / 4420 Series) |
| Material | High-Grade Aluminum Alloy, Anodized |
| Operating Pressure | Vacuum (to 10⁻⁷ Torr) |
| Seal Type | Fluoroelastomer (Kalrez® / Chemraz® Compatible) |
| Mounting | Flange Mount, 4-Bolt Pattern |
| Weight | 1.8 kg |
| Dimensions (W×D×H) | 120 mm × 80 mm × 60 mm |
| RoHS Compliance | Yes (2011/65/EU) |
| Revision | A |
| Country of Origin | USA |
| Warranty | 12 Months |
1 .Our company specializes in automation industrial control accessories. We have more than 100,000 products.
Including : frequency converter, servo driver, servo motor, data acquisition card, industrial camera, touch screen, circuit board, DCS module, soft starter, industrial computer,encoder... etc
2，We accept PayPal transaction. All products provided 60 days warranty. We can send the goods by fast express to all over world.
3. We can supply the product in brand new or used condition to meet your requirement.The picture and price show on our store is not real, before purchasing, please contact us to provide you with accurate quotation and real pictures.
4. If you can not find the product you need in our store, please contact us .we will check it for you.