1 PCS used MKS EDGE 380R40A-E11 RF Generator #LYQ007
1 PCS used MKS EDGE 380R40A-E11 RF Generator #LYQ007
| Parameter | Value |
|---|---|
| Model | EDGE 380R40A-E11 |
| RF Frequency | 400 kHz |
| Output Power | 3800 W (3.8 kW) nominal |
| Input Power | 3-phase 200–208 VAC, 50/60 Hz |
| Cooling | Water-cooled |
| Water Flow | Min. 1 Gal/min (≈3.8 L/min) |
| Water Pressure | Max. 80 PSI |
| Power Accuracy | ±1 W or ±1% of setpoint |
| Frequency Accuracy | < ±0.005% |
| Harmonics (50 Ω load) | ≤ –45 dBc |
| Spurious (50 Ω load) | ≤ –45 dBc |
| Pulse Capability | 1 Hz – 50 kHz, multi-level, master/slave |
| Control Interface | RS-232, Ethernet, DeviceNet, EtherCAT, Analog |
| RF Connector | Type N |
| Operating Temp | 5–40 °C |
| Weight | Approx. 13 kg (29 lbs) |
| Form Factor | Standard rack mount |
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