1 PCS used AMAT 0010-26029 RF Power Controller #LYQ007
1 PCS used AMAT 0010-26029 RF Power Controller #LYQ007
| Parameter | Specification | Unit | Notes |
|---|---|---|---|
| Part Number | 0010-26029 | - | Genuine AMAT Original |
| Description | RF Power Controller / Auto-Match Network | - | For Semiconductor Process Chambers |
| Brand | Applied Materials (AMAT) | - | |
| Frequency Range | 13.56 (Standard ISM Band) | MHz | Typical for Etch / PECVD |
| Power Handling | Up to 5 kW | kW | Depending on System Configuration |
| Control Type | Closed-Loop Auto-Match | - | V/I Sensor Feedback |
| Response Time | < 100 | ms | Typical |
| Communication | RS-485 / DeviceNet | - | Host Interface |
| Actuation | Dual-Channel Stepper Motors | - | For Variable Capacitors |
| Input Voltage | 200–240 VAC | V | Single/Three Phase |
| Operating Temp | 0 to +55 | °C | Semiconductor Cleanroom Rated |
| Protection | Over-Voltage, Over-Current, Over-Temp | - | Full Safety Interlocks |
| Certifications | CE, SEMI S2/S8, RoHS | - | Standard Approvals |
| Applications | Etching, PVD, PECVD | - | AMAT Centura / Producer Platforms |
| Weight | Approx. 10 | kg | |
| Dimensions | Standard Rack Mount | mm |
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