1 PCS used ENI GHW-50A (GHW50A-13DF3H0-005) RF Generator #LYQ007
1 PCS used ENI GHW-50A (GHW50A-13DF3H0-005) RF Generator #LYQ007
| Parameter | Details |
|---|---|
| Manufacturer | ENI (MKS Instruments) |
| Model Number | GHW-50A |
| Part Number | GHW50A-13DF3H0-005 |
| Output Power | 5000 W (5 kW) nominal |
| Frequency | 13.56 MHz ±0.005% |
| Load Impedance | Any load within unconditional stability limits |
| RF Stability / Spurious Output | < -45 dBc |
| Harmonic Output & Distortion | < -40 dBc |
| Load Mismatch Protection | Automatic forward power limit at 20% of rated reverse power; typical response 0.25 ms |
| Power Regulation Tolerance | >500 W: ±1.5% of set point; <500 W: ±10.0 W |
| AC Input (GHW-50A) | 200/208 VAC, 3/PE~ (3W+G), 30 A/phase; 380/400 VAC, 3/PE~ (3W+G), 15 A/phase; 50/60 Hz |
| RF Connector | N-type |
| Control Interface | RS-232 (9-pin D-sub), Analog I/O, Matchwork Interface |
| Display | Digital readout (frequency, forward/reflected/load power) |
| Cooling | Water-cooled |
| Dimensions (H×W×D) | 221 × 483 × 560 mm (8.72 × 19 × 22.1 in) |
| Weight | Approx. 41.3 kg (91 lb) |
| Mounting | 19-inch rack-mountable |
| Applications | Semiconductor etching, PECVD/PVD, ion cleaning, thin-film processes |
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