1 PCS used APPLIED MATERIALS (AMAT) 0190-09395 HEATER DRIVER #LYQ007
1 PCS used APPLIED MATERIALS (AMAT) 0190-09395 HEATER DRIVER #LYQ007
| Parameter Category | Parameter Name | Value / Description |
|---|---|---|
| Basic Information | Manufacturer | Applied Materials (AMAT) |
| Part Number | 0190-09395 | |
| Product Type | Heater Driver Module (Precision Heating Control) | |
| Compatible Platform | Semiconductor Manufacturing Equipment (e.g., Etch/CVD Chambers) | |
| Electrical Specifications | Input Voltage | 200-240 VAC, 50/60 Hz (Single/Three Phase) |
| Output Power Rating | Up to 15 kW (Continuous) | |
| Output Current | Max 63 A per Channel | |
| Number of Output Channels | 2 Independent Heater Channels | |
| Control Signal Input | Analog (0-10 VDC / 4-20 mA) + Digital I/O (TTL) | |
| Control Method | Phase-Angle / Zero-Cross Triggering (SCR) | |
| Performance & Accuracy | Temperature Control Accuracy | ±0.1°C (Closed-Loop) |
| Output Regulation | ≤ ±1% of Full Scale | |
| Response Time | < 100 ms | |
| Protection Features | Over-Temperature Protection | Yes (Internal + External Sensor Input) |
| Over-Current / Short-Circuit | Yes (Fused + Electronic Trip) | |
| Over-Voltage / Under-Voltage | Yes | |
| Fan Failure Detection | Yes | |
| Earth Leakage Detection | Yes | |
| Environmental | Operating Temperature | 0°C to +50°C |
| Storage Temperature | -20°C to +70°C | |
| Relative Humidity | 5% – 95% (Non-Condensing) | |
| Cooling | Forced Air (Internal Fans) | |
| Physical | Dimensions (W x H x D) | 267 mm x 356 mm x 457 mm |
| Weight | Approx. 12.7 kg | |
| Mounting | Rack-Mount (19-inch Cabinet) | |
| Interfaces | Analog Input | 2 x Heater Sensor (RTD/TC) Inputs |
| Digital I/O | 8 x Opto-Isolated Inputs / 8 x Relay Outputs | |
| Communication | RS-485 (Modbus RTU) | |
| Connectors | Industrial Terminal Blocks + Multi-Pin Connectors | |
| Standards | Safety Certifications | CE, SEMI S2, NFPA 70E |
| EMC Compliance | EN 61326, EN 61000-6-2/4 |
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