1 PCS used Lam NOVELLUS Temperature Control Cabinet 02-395666-12 #LYQ007
1 PCS used Lam NOVELLUS Temperature Control Cabinet 02-395666-12 #LYQ007
| Parameter | Specification |
|---|---|
| Manufacturer | Lam Research (Novellus Systems) |
| Part Number | 02-395666-12 |
| Product Type | Temperature Control Cabinet (ASSY LPB NEXT PVD SINGL GAP UPS K-SPEC) |
| Input Power | 200-240 VAC, 50/60 Hz, Single/Three Phase |
| Control Channels | Multi-zone PID temperature control |
| Temperature Range | -50°C to +450°C (zone-dependent) |
| Control Accuracy | ±0.1°C |
| Output Type | Analog (4-20mA / 0-10V) / Relay / SCR |
| Communication Interface | RS-232 / RS-485 / Ethernet / SECS/GEM |
| Operating Environment | Ambient Temp: 0°C to +45°C; Humidity: 10-90% RH (non-condensing) |
| Protection Rating | IP20 (Indoor Use) |
| Dimensions (W x H x D) | Standard Rack Mount (19") |
| Certifications | CE, SEMI S2 |
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