1 PCS used TDK MSE181H RF match #LYQ007
1 PCS used TDK MSE181H RF match #LYQ007
| Parameter | Specification | Unit |
|---|---|---|
| Model | MSE181H | — |
| RF Power Rating (Continuous) | 1800 | W |
| Frequency Range | 13.56 (fixed) | MHz |
| Input Impedance | 50 | Ω |
| Matching Capability (Load) | 0 – 500 pF
|
— |
| Control Interface | Analog (0–10 VDC) / RS-232 | — |
| Response Time | < 100 | ms |
| VSWR (Max Input) | 1.5:1 | — |
| Supply Voltage | 200–240 VAC, 1φ, 50/60 Hz | — |
| Power Consumption (Idle) | < 300 | W |
| Operating Temp. | 0 ~ +50 | °C |
| Dimensions (W×D×H) | 483 × 450 × 266 | mm |
| Weight | ~ 38 | kg |
| Applications | Plasma Etch, PECVD, Sputtering | — |
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