1 PCS used LAM 778-131331-001 pump #LYQ007
1 PCS used LAM 778-131331-001 pump #LYQ007
| Parameter | Value |
|---|---|
| Part Number | 778-131331-001 |
| Manufacturer | Lam Research (LAM) |
| Product Type | Semiconductor Equipment Component / Spare Part |
| Equipment Family | Likely for Etch or Deposition Systems (e.g., Flex, Kiyo, Sabre) |
| Material | High-purity ceramic / Quartz / Metal Alloy (Exact grade proprietary) |
| Dimensions | Proprietary (Custom for chamber fit) |
| Weight | Proprietary |
| Temperature Rating | Up to 1000°C (Typical for chamber components) |
| Chemical Resistance | HF, HCl, O2 Plasma, Fluorine-based chemistries |
| RoHS Compliance | Yes (Compliant with EU RoHS 2.0) |
| Lead Time | 8-12 weeks (OEM standard) |
| Alternative P/N | None (OEM exclusive) |
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