1 PCS used Lam Research LAMCAT NODE AMPDS Controller (853-B17571-001) #LYQ007
1 PCS used Lam Research LAMCAT NODE AMPDS Controller (853-B17571-001) #LYQ007
| Parameter | Details |
|---|---|
| Manufacturer | Lam Research Corporation |
| Part Number | 853-B17571-001 |
| Product Line | LAMCAT NODE AMPDS (Advanced Multi-Channel Process Detection System) |
| Function | High-speed signal conditioning & amplification for plasma process sensors (optical emission, interferometry, etc.) |
| Input Type | Analog sensor signals (low-level voltage/current from photomultipliers, photodiodes) |
| Output Interface | High-speed digital (fiber optic/RS-485) + analog (0-10V / 4-20mA) |
| Sampling Rate | Up to 10 MHz per channel |
| Channels | 8 independent input channels |
| Gain Range | 1 – 10,000x (software programmable) |
| Bandwidth | DC to 3 MHz |
| Resolution | 16-bit A/D conversion |
| Power Requirements | 24 VDC ±10%, 150 W |
| Communication | Ethernet (TCP/IP), DeviceNet, Host Link (parallel) |
| Operating Temp | 0°C to +50°C |
| Storage Temp | -20°C to +70°C |
| Humidity | 5–95% RH (non-condensing) |
| Dimensions (W×H×D) | 19” rack mount (3U) |
| Weight | 4.5 kg |
| Certifications | CE, SEMI S2, RoHS compliant |
| Typical Use | Real-time plasma endpoint detection, process monitoring in etch/deposition tools |
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