1 PCS used MKS πMFC P6A-28032 Mass Flow Controller #LYQ007
1 PCS used MKS πMFC P6A-28032 Mass Flow Controller #LYQ007
| Parameter | Specification |
|---|---|
| Part Number | P6A-28032 |
| Model Series | πMFC (PFC-60) |
| Gas Type | Argon (Ar) |
| Flow Range | 10 SCCM (Standard Cubic Centimeters per Minute) |
| Accuracy | ±1% of setpoint for 10–100% F.S.; ±0.2% of F.S. for 2–10% F.S. |
| Repeatability | ±0.3% of Reading |
| Resolution | 0.1% of Reading |
| Operating Pressure | Inlet: 4 to 1200 Torr |
| Pressure Accuracy | ±1% of Reading |
| Temperature Range | Operating: 10°C to 50°C; Storage: -20°C to 65°C |
| Temperature Coefficient | Zero: <0.05% F.S./°C; Span: <0.08% Reading/°C |
| Control Valve | Normally Closed (N.C.) |
| Response Time | ≤500 milliseconds (Typical) |
| Wetted Materials | 316L Stainless Steel (Metal-sealed) |
| Fitting Type | Downmount (W-seal) / 4 VCR® compatible |
| Electrical Interface | 9-pin D-Sub (Analog I/O) |
| Power Supply | +15 VDC (±5%), 350 mA Max |
| Leak Integrity | External: <1x10⁻⁹ scc/sec He |
| Dimensions (L×W×H) | 4.20 × 1.20 × 5.00 inches |
| Weight | 2.20 lbs |
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