Semiconductor wafer handling & motion control (Lam Research equipment)
Type
Multi-axis servo controller module
Parameter
ICS-1
ICS-2
Dimensions (W×D×H)
146 mm × 300 mm × 28 mm
146 mm × 300 mm × 28 mm
Weight
0.85 kg
0.92 kg
Mounting
3U rack-mountable
3U rack-mountable
Connectors
HD-68, D-Sub 25, RJ45
HD-68, D-Sub 25, RJ45, Fiber Optic
Parameter
Specification
Input Voltage
24 VDC ±10%
Power Consumption
45 W (max)
Isolation Voltage
1500 VAC (I/O to logic)
Overcurrent Protection
6 A self-resetting fuse
ESD Rating
HBM: ±2000 V, MM: ±200 V
Parameter
ICS-1
ICS-2
Control Axes
4-axis servo/stepper
8-axis servo/stepper
Positioning Resolution
0.1 µm (encoder input)
0.05 µm (encoder input)
Update Rate
125 µs (position loop)
62.5 µs (position loop)
Max Axis Speed
12.5 m/s (encoder dependent)
25 m/s (encoder dependent)
Position Error
±1 encoder count
±0.5 encoder count
Synchronization Accuracy
±5 µs
±1 µs
1 .Our company specializes in automation industrial control accessories. We have morethan 100,000 products. Including : frequency converter, servo driver, servo motor, data acquisition card, industrial camera, touch screen, circuit board, DCS module, soft starter, industrial computer,encoder... etc 2，We accept PayPal transaction. All products provided 60 days warranty. We can send the goods by fast express to all over world. 3. We can supply the product in brand new or used condition to meet your requirement.The picture and price show on our store is not real, before purchasing, please contact us to provide you with accurate quotation and real pictures. 4. If you can not find the product you need in our store, please contact us .we will check it for you.
