1 PCS used Lam Research Vacuum Valve (796-293477-100) #LYQ007
1 PCS used Lam Research Vacuum Valve (796-293477-100) #LYQ007
| Parameter | Specification |
|---|---|
| Part Number | 796-293477-100 |
| OEM | Lam Research |
| Type | High Vacuum / Semiconductor Process Valve |
| Body Material | 316L Stainless Steel (Standard) |
| Seal Type | Bellows / Metal & Fluoropolymer (O-Ring) |
| Leak Rate | < 1 x 10⁻⁹ atm·cc/s (He) |
| Pressure Range | UHV to 150 psig (10 bar) |
| Operating Temp | -40°C to +150°C |
| Bakeout Temp | Max 120°C (Body) |
| Connection | VCR / Face Seal Fitting (1/4" or 3/8") |
| Actuation | Pneumatic (Air: 80–100 psig) |
| Cycle Life | > 1,000,000 cycles |
| Weight | ~ 0.8 kg |
| MFG (Typical) | Swagelok / MKS (OEM for Lam) |
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