1 PCS used MKS GPCAA13TS83UT1010 Pressure Controller #LYQ007
General Information
Model: GPCAA13TS83UT1010
Product Type: General Purpose Pressure Controller (PC)
Brand: MKS Instruments
Control Mode: Upstream
Valve Type: Normally Closed (N.C.)
Wetted Materials: 316L SS, PTFE (Teflon)
Communication: EtherCAT
Weight: <3 lbs (1.36 kg)
Compliance: CE
Parameter
Value
Pressure Type
AbsoluteMKS
Full Scale Range
1000 Torr (13T)MKS
Over Pressure Limit
2x Full ScaleMKS
Maximum Differential Pressure
45 psidMKS
Burst Pressure
1500 psigMKS
Pressure Measurement Accuracy
±0.5% of ReadingMKS
Pressure Control Accuracy
±1.0% of Reading (≥10% FS); ±0.2% of FS (<10% FS)MKS
Control Range
>2 to 100% of Full ScaleMKS
Typical Response Time
<1.0 secondMKS
Pressure Resolution
0.1 TorrMKS
Readout Units
Torr, kPa, psi, mbarMKS
Zero Temperature Coefficient
±0.02% of Full Scale/°CMKS
Span Temperature Coefficient
±0.04% of Reading/°CMKS
Operating Temperature
10°C to 50°C (50°F to 122°F)MKS
Storage Temperature
-20°C to 80°C (-4°F to 176°F)MKS
Storage Humidity
0–95% RH, non-condensingMKS
Parameter
Value
Fittings
Swagelok 4 VCR MaleMKS
Surface Finish
10 µin Ra electropolishedMKS
External Leak Rate
<1 x 10⁻¹⁰ scc/sec HeMKS
Valve Leak Rate
<1.0% of orifice FS (N₂ at 25 psig)MKS
Input Power
+24 VDC (<5 watts)MKS
Connector
2 x RJ-45 (comm.), M8 male (power)MKS
Data Rate
100 MbpsMKS
Network Size
Up to 4095 nodesMKS
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