1 PCS used MKS ENI C13002-05 RF Power Supply Part Number: 660-080455-635#LYQ007
1 PCS used MKS ENI C13002-05 RF Power Supply Part Number: 660-080455-635#LYQ007
| Parameter | Specification |
|---|---|
| RF Output Power | 13 kW (nominal) |
| Frequency Range | 1.8 – 2.17 MHz |
| Input Voltage | 3-phase, 208VAC / 480VAC (auto-ranging) |
| Input Frequency | 50/60 Hz |
| Control Interface | Digital (RS-232 / Ethernet), Analog (0-10V, 4-20mA) |
| Impedance Matching | Built-in DPLL (Digital Phase-Locked Loop) |
| Reflected Power Protection | Full protection, auto-shutdown |
| Cooling | Forced air (dual fans) |
| Dimensions (W×H×D) | 19" rack mount, 3U × 483 × 600 mm |
| Weight | 68.2 kg (150 lbs) |
| Operating Temp | 0 – +40 °C |
| Compliance | CE, SEMI S2 |
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