1 PCS used PEARL KOGYO M-05A2VD-13M-L(T06A) RF Matching Box #LYQ007
1 PCS used PEARL KOGYO M-05A2VD-13M-L(T06A) RF Matching Box #LYQ007
| Parameter | Value |
|---|---|
| Model | M-05A2VD-13M-L (T06A) |
| Manufacturer | PEARL KOGYO Co., Ltd. |
| Type | Automatic RF Impedance Matching Box (Matching Network) |
| Design Frequency | 13.56 MHz (ISM band) |
| Max Input Power | 5 kW (CW) |
| Impedance Range | Standard 50 Ω input; variable load matching (typical: 1–500 Ω, ±j500 Ω) |
| Control Interface | Digital / Analog (RS-232C or parallel I/O, +24 VDC logic) |
| Matching Speed | < 500 ms typical |
| VSWR | < 1.1:1 after tuning |
| Cooling | Air cooling / Forced ventilation |
| Supply Voltage | 200–240 VAC, 50/60 Hz, single-phase |
| Dimensions (W×D×H) | Approx. 430 × 300 × 177 mm (19-inch rack mountable) |
| Weight | Approx. 18 kg |
| Applications | Semiconductor etching, PECVD, plasma processes |
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