±5% or 200 W (whichever is greater)Advanced Energy
Maximum Plasma Voltage
325 VₐₘₛAdvanced Energy
Minimum Plasma Current
5 AₐₘₛAdvanced Energy
Maximum Primary Current
120 AₐₘₛAdvanced Energy
Parameter
Value
Ignition Pressure Range
100 mTorr - 1 Torr (O₂/N₂ up to 4 SLM)
Operating Flow Range
0.2 - 4 SLM (pure O₂; 90% O₂/10% N₂)
Operating Pressure Range
100 mTorr - 4 Torr
Duty Cycle
Continuous operation within specified ranges
Cooling Method
Hybrid (air and water)Advanced Energy
Ambient Temperature
+5°C to +40°C (+41°F to +104°F)
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