1 PCS used LAM 853-310249-102 controller #LYQ007
1 PCS used LAM 853-310249-102 controller #LYQ007
| Parameter | Value | Unit | Note |
|---|---|---|---|
| Part Number | 853-310249-102 | - | Lam Research |
| Product Type | Controller Assembly, Drive, 4-Axis | - | For Semiconductor Etch Tool |
| Nominal Supply Voltage | 48 | VDC | Factory Calibrated |
| Axes | 4 | - | Simultaneous Motion Control |
| Weight | 1.1 | kg | Net Weight |
| Compatible Subassemblies | 710-310252-004, 810-310252-004, 210-310252-004 | - | Matching Drive Modules |
| Form Factor | Lam Research Proprietary | - | Tool-Specific Integration |
| Environmental Class | Cleanroom (Class 1000 or Better) | - | Semiconductor Fab Grade |
| Communication Interface | Fieldbus (Tool-Dependent) | - | Proprietary to Host Etch Tool |
| Safety Compliance | SEMI S2, SEMI S8 | - | Semiconductor Equipment Standard |
1 .Our company specializes in automation industrial control accessories. We have more than 100,000 products.
Including : frequency converter, servo driver, servo motor, data acquisition card, industrial camera, touch screen, circuit board, DCS module, soft starter, industrial computer,encoder... etc
2，We accept PayPal transaction. All products provided 60 days warranty. We can send the goods by fast express to all over world.
3. We can supply the product in brand new or used condition to meet your requirement.The picture and price show on our store is not real, before purchasing, please contact us to provide you with accurate quotation and real pictures.
4. If you can not find the product you need in our store, please contact us .we will check it for you.