Home 1 PCS used AMAT 0190-75531 Vacuum Pressure Control Panel #LYQ007

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1 PCS used AMAT 0190-75531 Vacuum Pressure Control Panel #LYQ007

Sale price $3,000.00
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1 PCS used AMAT 0190-75531 Vacuum Pressure Control Panel #LYQ007
1 PCS used AMAT 0190-75531 Vacuum Pressure Control Panel #LYQ007
Sale price$3,000.00
1 PCS used AMAT 0190-75531 Vacuum Pressure Control Panel #LYQ007

1 PCS used AMAT 0190-75531 Vacuum Pressure Control Panel #LYQ007

$3,000.00
Parameter Details
Part Number 0190-75531
Description Vacuum Pressure Control Panel (Semiconductor Process)
Manufacturer Applied Materials (AMAT)
Application Precision vacuum/pressure regulation in CVD/PVD/Etch chambers
Control Type Closed-loop PID pressure control
Item Specification
Measurement Range 1 Torr ~ 760 Torr (adjustable)
Control Accuracy ± 0.1% FS
Resolution 0.01 Torr
Response Time < 100 ms
Sensor Type Capacitance Diaphragm Gauge (CDG)
Parameter Value
Supply Voltage 24 VDC ± 10%
Power Consumption < 18 W
Isolation Voltage ≥ 2500 VDC
Protection Over-voltage, over-current, short-circuit, over-temperature
Interface Type/Details
Analog Input 0–10 V / 4–20 mA (pressure feedback)
Analog Output 0–10 V / 4–20 mA (control signal)
Digital I/O 2× Relay (2 A/240 VAC), 2× TTL (5 V)
Communications RS-485 (Modbus RTU)
Connector D-sub 15-pin / Terminal block

1  .Our company specializes in automation industrial control accessories. We have more than 100,000 products.  
 Including : frequency converter, servo driver, servo motor,   data acquisition card, industrial camera, touch screen, circuit board, DCS module, soft starter, industrial   computer,encoder... etc
2，We accept PayPal transaction. All products provided 60 days warranty. We can send the goods by fast express to all over world.
 3. We can supply the product in brand new or used condition to meet your requirement.The picture and price show on our store is not real, before purchasing, please    contact us to provide you with accurate quotation and real pictures.
4. If you can not find the product you need in our store, please contact us .we will check it for you.

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