1 PCS used Brooks Automation 017-0024-01 Wafer Prealigner #LYQ007
1 PCS used Brooks Automation 017-0024-01 Wafer Prealigner #LYQ007
| Parameter | Specification |
|---|---|
| Wafer Compatibility | 300 mm (12-inch) wafers |
| Alignment Type | Notch & Flat detection |
| Centering Accuracy | ≤ ± 0.05 mm (3σ) |
| Angular Accuracy | ≤ ± 0.003° (3σ) |
| Throughput | Typically < 5 seconds per wafer |
| Communication Interface | RS-232 / Digital I/O |
| Power Requirements | 24 VDC, ±10%, Max 50 W |
| Operating Environment | Temperature: 18–25 °C; Humidity: 30–70% RH (non-condensing) |
| Cleanroom Class | Class 1 (ISO 3) compatible |
| Materials | Stainless steel construction |
| Dimensions (W×D×H) | Approx. 250 × 350 × 280 mm |
| Weight | Approx. 12 kg |
| Vacuum Chuck | 20 in. Hg (0.5 scfm) |
| Features | Auto-centering, notch/flat alignment, wafer presence detection |
1 .Our company specializes in automation industrial control accessories. We have more than 100,000 products.
Including : frequency converter, servo driver, servo motor, data acquisition card, industrial camera, touch screen, circuit board, DCS module, soft starter, industrial computer,encoder... etc
2，We accept PayPal transaction. All products provided 60 days warranty. We can send the goods by fast express to all over world.
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