1 PCS used AMAT 0190-87725 Vacuum Angle Valve #LYQ007
Parameter
Specification
Part Number
0190-87725
Manufacturer
Applied Materials (AMAT)
Product Type
Pneumatic Vacuum Angle Valve
Application
Semiconductor Manufacturing Vacuum Systems
Valve Design
Bellows-sealed, right-angle pattern
Parameter
Specification
Pressure Range
Atmospheric to 1×10⁻⁹ Torr
Leak Rate
< 1×10⁻¹⁰ atm·cc/sec (He)
Actuation Type
Pneumatic (Double-acting)
Operating Pressure
4.3–5.8 bar (60–84 psi)
Response Time
< 100 ms (open/close)
Cycle Life
> 1,000,000 cycles
Bakeout Temperature
Max 150°C (continuous), 200°C (intermittent)
Component
Material
Body
316L Stainless Steel
Bellows
316L Stainless Steel
Seal
Viton Fluoroelastomer
Actuator Housing
Anodized Aluminum
Internal Components
304 Stainless Steel
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