1 PCS used AMAT 0010-02747 RF Matcher #LYQ007
1 PCS used AMAT 0010-02747 RF Matcher #LYQ007
| Parameter | Value |
|---|---|
| Manufacturer | Applied Materials (AMAT) |
| Part Number | 0010-02747 |
| Model Name | R1 DPS Enhanced Metal RF Match |
| Function | RF impedance matching for semiconductor plasma processes |
| Operating Frequency | 13.56 MHz (typical for AMAT DPS systems) |
| Max RF Power | Up to 3 kW (typical for DPS chamber) |
| Input Impedance | 50 Ω (standard RF generator) |
| Matching Network | Pi-type (Tune + Load variable capacitors + fixed inductor) |
| Control Interface | Analog/digital control (compatible with AMAT DPS controllers) |
| Physical Form | Rack-mountable matching box |
| Application | DPS (Decoupled Plasma Source) etch/deposition chambers |
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