1 PCS used Lam Research Controller 853-341285-002 #LYQ007
1 PCS used Lam Research Controller 853-341285-002 #LYQ007
| Parameter | Value |
|---|---|
| OEM Part Number | 853-341285-002 |
| Manufacturer | Lam Research Corporation |
| Product Type | Integrated System Controller Module |
| Application | Semiconductor Process Equipment (Etch / Deposition Tools) |
| Interface | Multi-Channel Digital I/O, Analog I/O, Serial Communication (RS-232/485, Ethernet) |
| Input Power | 24 VDC ±10%, 3.5 A Max |
| Operating Temperature | 0°C to +50°C (32°F to 122°F) |
| Storage Temperature | -40°C to +85°C (-40°F to 185°F) |
| Relative Humidity | 5% – 95% (Non-Condensing) |
| Dimensions (W x H x D) | 30.48 cm x 17.78 cm x 22.86 cm (12" x 7" x 9") |
| Weight | 2.7 kg (6.0 lbs) |
| Compliance | CE, SEMI S2, RoHS |
| Warranty | 12 Months (OEM Standard) |
| Condition | New / Refurbished (OEM Spec) |
| Calibration | Factory Calibrated to Lam Research Original Specifications |
| Functional Test | Full Performance Verification on Lam Production Tools |
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