1 PCS used Spellman ESC5PN25X4432 High Voltage Power Module #LYQ007
1 PCS used Spellman ESC5PN25X4432 High Voltage Power Module #LYQ007
| Parameter | Specification |
|---|---|
| Manufacturer | Spellman High Voltage Electronics Corporation |
| Model Number | ESC5PN25X4432 |
| Series | ESC Series (Electrostatic Chuck Power Supplies) |
| Input Voltage | +24 Vdc, ±10% @ 2 A max |
| Output Configuration | Floating, reversible polarity bipolar with floating center tap |
| Output Voltage | 0 to ±750 Vdc (0 to 1500 Vdc total) |
| Output Current | 5 mA nominal |
| Short Circuit Current Limit | 5.5 mA maximum |
| Output Voltage Accuracy | < 2% of set point (50–5000 Vdc range) |
| Program/Monitor Accuracy | ±1% full scale, ±50 mV |
| Stability | ±0.7% over specified temperature range |
| Output Ripple | < 2.5 Vrms typical |
| Slew Rate | 40 ms typical |
| Arc Quench Rate | 10 times per second max |
| Output Isolation | Center tap isolated to ±2 kV from ground |
| Dimensions (W x H x L) | 9.0 x 1.5 x 6.1 in (228.6 x 30.5 x 155 mm) |
| Weight | 4.5 lbs (2.0 kg) |
| Applications | Electrostatic chuck (wafer processing) |
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