1 PCS used MKS DELTA Flow Controller FRCA141B24#LYQ007
1 PCS used MKS DELTA Flow Controller FRCA141B24#LYQ007
1 PCS used MKS DELTA Flow Controller FRCA141B24#LYQ007
Original Factory Precision Parameters (Model: MKS DELTA FRCA141B24 Flow Controller)
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Parameter Category
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Parameter Name
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FRCA141B24 Specification
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Basic Information
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Product Model
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FRCA141B24; MKS DELTA Genuine Original Flow Controller, 100% unused and unrefurbished genuine parts; Industrial-grade precision gas flow controller
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Manufacturer Standard
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Manufactured by MKS; Complies with CE, UL, ISO 9001, IEC 61010-1, RoHS 2.0 Standards; Conforms to MKS Internal Technical and Quality Norms for Flow Controllers; Anti-EMI/EMS design meets industrial precision operation requirements
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Product Application
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Semiconductor Manufacturing, Industrial Process Control, Laboratory Gas Analysis, Chemical Reaction Control, Vacuum Coating, Optical Fiber Manufacturing, Medical Equipment, Precision Gas Distribution Systems
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Core Performance Parameters
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Flow Controller Type
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Thermal Mass Flow Controller (MFC); Constant Flow Control Mode; Suitable for precise control of dry, non-corrosive, non-condensing gases
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Flow Range (Full Scale)
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0 ~ 500 sccm (Standard Cubic Centimeters per Minute); Adjustable; Continuous Flow Control, no obvious fluctuation during long-term operation
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Flow Control Precision
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±0.5% FS (Full Scale); High control precision, meeting the requirements of high-precision gas flow control applications
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Flow Repeatability
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±0.1% FS; Excellent repeatability, ensuring consistent flow output in long-term cyclic operation
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Linearity
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±0.5% FS; Good linearity, ensuring accurate flow control at any point within the full flow range
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Response Time
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≤100 ms (90% of Full Scale); Fast response, quickly adapt to gas flow demand changes in the process
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Zero Drift
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≤±0.1% FS/Year; Low zero drift, reducing the frequency of calibration and ensuring long-term measurement accuracy
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Temperature Coefficient
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≤±0.01% FS/℃ (Operating Temperature Range); Low temperature influence, ensuring stable performance in different temperature environments
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Gas & Pressure Parameters
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Compatible Gas Types
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Air, Nitrogen (N₂), Argon (Ar), Helium (He), Oxygen (O₂), Hydrogen (H₂), Methane (CH₄) and other dry, non-corrosive, non-condensing gases; Customizable for special gas types
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Inlet Pressure Range
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0.1 ~ 1.0 MPa (1 ~ 10 Bar); Stable flow control under different inlet pressure conditions within the range
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Outlet Pressure Range
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0.05 ~ 0.8 MPa (0.5 ~ 8 Bar); Adjustable according to actual process requirements
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Pressure Coefficient
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≤±0.05% FS/MPa; Low pressure influence, ensuring flow stability when inlet/outlet pressure changes slightly
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Gas Purity Requirement
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≥99.99% (Clean Dry Gas); No oil, dust or other impurities, avoiding sensor and valve blockage
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≤1×10⁻⁹ Pa·m³/s (He); Ultra-low leak rate, ensuring no gas leakage and process safety
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Control & Communication Parameters
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Control Mode
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Manual Control (Local Knob) + Remote Control (Standard); Support 4~20 mA DC Signal Control, RS485 (Modbus-RTU) Communication
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Communication Baud Rate
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RS485: 9600~115200 bps (Adjustable); Support remote parameter configuration, flow monitoring and fault query
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Control Signal Input
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4~20 mA DC (Isolated); 0~10 V DC (Optional); Precise flow adjustment via external control signal
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Feedback Signal Output
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4~20 mA DC (Isolated); Real-time output of actual flow parameters for monitoring and feedback control
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Interface Protection
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2500 V AC Optical Isolation (1 Minute); ESD Protection ±15 kV (Contact), ±25 kV (Air); Protect internal control components from interference and damage
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Display Function
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LED Digital Display; Real-time display of Actual Flow, Set Flow and Working Status; Display Accuracy: ±0.1%
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Protection & Safety Parameters
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Over-Flow Protection
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Built-in Flow Detection; Alarm & Cut off Gas Output when Flow ≥110% FS; Automatic Recovery after Fault Elimination
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Under-Flow Protection
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Alarm when Flow ≤5% FS (Adjustable); Prompt for abnormal flow conditions, ensuring process safety
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Over-Temperature Protection
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Alarm & Cut off Gas Output when Internal Temperature ≥85℃; Automatic Recovery after Cooling to ≤75℃; Protect internal components
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Sensor Fault Protection
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Alarm & Cut off Gas Output when Sensor Open/Short Circuit; Prevent misoperation caused by sensor failure
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Valve Fault Protection
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Alarm when Valve Jam/Leakage is Detected; Prompt for maintenance, avoiding gas waste and safety hazards
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Fault Alarm Function
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Built-in Fault Self-Diagnosis Function; Output Alarm Signal (Sound & Light) when Fault Occurs; Support Fault Log Storage (Max 500 Entries); Convenient for Fault Diagnosis and Maintenance
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Password Protection
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Support 6~16 Bit Password Protection; Prevent Misoperation and Parameter Modification; Protect Flow Control Precision Parameters
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Environmental & Structural Parameters
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Operating Temperature
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-10℃ ~ 60℃; Stable operation in extreme temperature environments, adapt to various industrial working conditions
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Storage Temperature
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-20℃ ~ 80℃; Stable storage performance, no performance degradation after long-term storage in harsh environments
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Relative Humidity
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5% ~ 95% (Non-Condensing); Resists humid industrial environments, no short circuit or malfunction
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Protection Class
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IP54; Dustproof and waterproof design, suitable for installation in outdoor or wet industrial sites
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Installation Type
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Base Mounting / DIN Rail Mounting (Optional); Installation Thread: M4 (Standard), Customizable; Easy to install and disassemble, convenient for maintenance
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Dimensions (L×W×H)
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180×100×220 mm (±2 mm); Compact structure, small installation space, easy to integrate with process equipment
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Functional & Other Parameters
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Start-up Time
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≤300 ms (Standard Working Conditions); Fast start-up, quickly enter working state, realize real-time flow control
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Remote Control Function
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Support Remote On/Off, Flow Adjustment, Parameter Configuration, Fault Query via RS485/Ethernet (Optional); Convenient for Centralized Control of Multiple Controllers
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Service Life
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≥10000 Operating Hours (Continuous Operation, Standard Working Conditions); High reliability, reducing maintenance frequency
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Calibration Function
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Support Manual Calibration & Automatic Calibration; Provide MKS Original Calibration Tools (Optional); Ensure Long-term Flow Precision and Parameter Consistency
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