1 PCS used Agilent 10898A Dual Laser-Axis Board (Option 10898-60102) #LYQ007
1 PCS used Agilent 10898A Dual Laser-Axis Board (Option 10898-60102) #LYQ007
| Parameter | Details |
|---|---|
| Manufacturer | Keysight / Agilent (formerly Hewlett-Packard) |
| Model Number | 10898A |
| Option Number | 10898-60102 |
| Product Type | Dual Laser-Axis Control Board (VMEbus) |
| Form Factor | VME 6U |
| Number of Axes | 2 (Dual-axis) |
| Measurement Resolution | λ/2048 (0.31 nm) with high-resolution plane mirror interferometer |
| Resolution Extension | ×256 |
| Maximum Velocity | 2700 mm/s (2.7 m/s) (plane mirror optics) |
| Position Data Update Rate | 10 MHz |
| Data Transfer Rate | 5 MHz Dual-Channel |
| Position Word Length | 35-bit (fractional wavelengths) |
| Asynchronous Sample/Hold Uncertainty | ±50 ns |
| Synchronous Sample/Hold Uncertainty | < 800 ps + < 40 ps/°C |
| Variable Data Age | < 1 nanosecond (typical) |
| External I/O | 4 + 1 external sample and data hold inputs |
| Bus Interface | VMEbus (real-time hardware output on P2 connector) |
| Typical Power Dissipation | 2.0 W |
| Applications | IC fabrication, semiconductor lithography (e-beam & step-and-scan), high-precision positioning systems |
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