1 PCS used Lam Control Board 810-039987-003 Rev: C #LYQ007
1 PCS used Lam Control Board 810-039987-003 Rev: C #LYQ007
| Parameter | Value/Description |
|---|---|
| Manufacturer | Lam Research Corporation |
| Part Number | 810-039987-003 |
| Revision | C |
| Product Type | Control Board / PCB Assembly |
| Board Function | System control, I/O signal processing, communication & logic control for semiconductor processing equipment |
| Input Voltage | +24 V DC, ±10% |
| Power Consumption | Typical: 18 W; Max: 25 W |
| Operating Temperature | 0°C to +55°C |
| Storage Temperature | -40°C to +85°C |
| Relative Humidity | 5% – 95% (non-condensing) |
| Dimensions (W × D × H) | 233 mm × 160 mm × 25 mm |
| Weight | 0.45 kg |
| Board Layers | 6-layer FR-4 PCB |
| Interfaces | - (2) × RS-232/485 serial ports
|
| Isolation | 2500 V RMS (signal to field I/O) |
| Compliance | CE, SEMI S2, RoHS |
| MTBF | > 120,000 hours @ 40°C |
| Supported Platforms | Lam 2300 Series Etch Systems |
| Firmware Version | V3.07 (Rev C compatible) |
| Connector Type | MIL-DTL-38999 & industrial terminal blocks |
| Protection | Over-voltage, over-current, reverse polarity, ESD (±15 kV air) |
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