1 PCS used AMAT 0040-61988 REV 003#LYQ007
1 PCS used AMAT 0040-61988 REV 003#LYQ007
| Parameter | Value / Description |
|---|---|
| Part Number | 0040-61988 |
| Revision | REV 003 |
| OEM | Applied Materials (AMAT) |
| Description | GAS LINE ASSY, SHIELD, CHAMBER |
| Material | High-purity aluminum alloy (anodized) |
| Dimensions (nominal) | Length: 385 mm ± 0.5 mm
|
| Surface Finish | Ra ≤ 0.8 μm (internal), electropolished |
| Fitting Type | VCR-style face seal fittings (3/8" & 1/4") |
| Seal Material | Kalrez® / PTFE (per OEM) |
| Max Pressure | 150 PSI (10.3 bar) |
| Max Temperature | 200 °C |
| Cleanliness | Class 10 (ISO Class 4) cleanroom assembled & packed |
| Leak Integrity | He leak rate ≤ 1×10⁻⁹ atm·cc/sec |
| Weight | 1.28 kg |
| Compatible Gases | Process gases (Ar, O₂, N₂, CF₄, SF₆, etc.) |
| Fits Equipment | Centura DPS II, MxP, Etch chambers |
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