1 PCS used LAM Control Board 810-231016-007 REV.A #LYQ007
1 PCS used LAM Control Board 810-231016-007 REV.A #LYQ007
| Parameter | Specification |
|---|---|
| Part Number | 810-231016-007 |
| Revision | REV.A |
| Product Line | Semiconductor Process Equipment Control |
| Board Dimensions | Standard 6U CompactPCI / VME |
| Power Input | +5 VDC, ±12 VDC, +24 VDC (Backplane) |
| Power Consumption | 25 W (Typical), 35 W (Max) |
| Microcontroller | 32-bit RISC Processor |
| Memory | Flash: 8 MB, SRAM: 2 MB, NVRAM: 512 KB |
| Communication Interfaces | - Ethernet 10/100/1000 Base-T
|
| I/O Configuration | - Digital Input: 32-ch, 24 VDC, Isolated
|
| Isolation | 2500 V RMS (Channel-to-Backplane) |
| Operating Temp | 0°C to +55°C (32°F to 131°F) |
| Storage Temp | -40°C to +85°C (-40°F to 185°F) |
| Relative Humidity | 5% – 95% (Non-condensing) |
| Certifications | CE, UL 60950-1, SEMI S2-0700 |
| MTBF | > 250,000 hours @ 40°C |
| Weight | 1.2 kg (2.65 lbs) |
| RoHS Compliance | Yes (2011/65/EU) |
| Application | Plasma Etch, Deposition, Process Control Modules |
| Firmware | Field-Upgradable via Ethernet/USB |
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