1 PCS used Lam Research Jetstream Gas Box Mainboard 810-073479-005 REV A #LYQ007
Parameter
Value
Manufacturer
Lam Research (LAM-Tencor)
Part Number
810-073479-005
Revision
REV A
Product Name
Jetstream Gas Box MB (Main Board)
Board Type
Printed Circuit Board (PCB), Control Motherboard
Application
Gas Box control for Lam Research Jetstream semiconductor etching systems
Country of Origin
United States
Parameter
Value
Weight
1.2 kg
Dimensions
Approx. 37.7 cm x 19.9 cm (standard PCB form factor for semiconductor equipment)
Board Construction
Multi-layer FR-4 glass epoxy PCB
Mounting
Vertical mounting in closed switchgear cabinet
Parameter
Value
Operating Voltage
Dual voltage: 5V and 12V-15V (typical for industrial control modules)
Control Interface
Multiple digital I/O, communication ports, and gas line control interfaces
Connectors
High-density industrial connectors for gas flow control, signal I/O, and communication
Pollution Level
Pollution level 2 (per EN60204/EN50178 standards)
Protection Class
IP 00
Compliance
Designed to meet SEMI standards for semiconductor equipment
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