1 PCS USED Lam Flow Controller 853-051190-526 #LYQ007
1 PCS USED Lam Flow Controller 853-051190-526 #LYQ007
| Parameter | Specification |
|---|---|
| Part Number | 853-051190-526 |
| Type | Digital Mass Flow Controller (MFC) |
| Flow Range | 500 sccm (Standard Cubic Centimeters per Minute) |
| Calibrated Gas | Nitrogen (N₂) |
| Accuracy | ±1% of Full Scale (F.S.) |
| Repeatability | ±0.2% of Full Scale (F.S.) |
| Response Time | ≤ 2 Seconds |
| Supply Voltage | 24 VDC |
| Control Method | Closed-loop control with thermal mass flow sensor |
| Valve Type | Normally Closed (NC) Solenoid Valve |
| Operating Pressure | Max. 1.0 MPa (10 bar) |
| Pressure Drop | 0.05 ~ 0.3 MPa |
| Operating Temperature | 5°C ~ 45°C |
| Wetted Materials | 316L Stainless Steel, Kalrez® / PTFE |
| Communication Interface | RS-485 (Modbus RTU) |
| Analog Output | 4-20 mA / 0-5 VDC (Optional) |
| Fit Connection | 1/4" VCR Fitting |
| Leak Rate | < 1 × 10⁻⁸ Pa·m³/s (He) |
| Dimensions (L×W×H) | 127 × 38 × 110 mm |
| Application | Semiconductor manufacturing gas delivery system |
1 .Our company specializes in automation industrial control accessories. We have more than 100,000 products.
Including : frequency converter, servo driver, servo motor, data acquisition card, industrial camera, touch screen, circuit board, DCS module, soft starter, industrial computer,encoder... etc
2，We accept PayPal transaction. All products provided 60 days warranty. We can send the goods by fast express to all over world.
3. We can supply the product in brand new or used condition to meet your requirement.The picture and price show on our store is not real, before purchasing, please contact us to provide you with accurate quotation and real pictures.
4. If you can not find the product you need in our store, please contact us .we will check it for you.