1 PCS used EyeD Precision Endpoint System Controller SD1024G-2-S AMAT #LYQ007
1 PCS used EyeD Precision Endpoint System Controller SD1024G-2-S AMAT #LYQ007
|
Parameter
|
Specification
|
Unit
|
Notes
|
|
Product Name
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Precision Endpoint System Controller
|
-
|
Genuine EyeD, Original Factory Production
|
|
Model No.
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SD1024G-2-S
|
-
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SD1024G Series, Factory Original Revision
|
|
Brand
|
EyeD
|
-
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Original Design & High Precision Standard
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|
Product Series
|
SD1024G
|
-
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Endpoint Detection & Spectroscopy Control
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|
Application
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Semiconductor Process Control
|
-
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Plasma Etching, Deposition & Wafer Inspection[2][3]
|
|
Parameter
|
Min
|
Typ
|
Max
|
Unit
|
Notes
|
|
Spectral Range
|
200
|
500
|
900
|
nm
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UV to Near IR Spectrum[3][4]
|
|
Spectral Resolution
|
-
|
1.33
|
1.7
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nm
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FWHM, Factory Calibrated[3][4]
|
|
Pixel Count
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1024
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1024
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1024
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pixels
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Scientific-Grade CCD Array[3]
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|
Wavelength Accuracy
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-
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<0.1
|
-
|
nm
|
200-800nm Range[3]
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|
Optical Transmission
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>70
|
75
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-
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%
|
Visible to Near IR[1]
|
|
Parameter
|
Min
|
Typ
|
Max
|
Unit
|
Notes
|
|
Supply Voltage
|
100
|
220
|
240
|
VAC
|
50/60Hz, Stable Power Input
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|
Readout Noise
|
7
|
13
|
27
|
electrons
|
Nominal, 2nm Band[3]
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|
Control Signal
|
Digital I/O
|
-
|
-
|
Process Control & Status Feedback
|
|
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