1 PCS used LAM Research 810-A06174-003 Control Board #LYQ007
1 PCS used LAM Research 810-A06174-003 Control Board #LYQ007
| Parameter | Details |
|---|---|
| Manufacturer | LAM Research Corporation |
| Part Number | 810-A06174-003 |
| Board Type | Node Interlock Control Board |
| Board Revision | REV: C/S |
| Input Voltage | 24 VDC (Typical) |
| Power Consumption | TBD (Typical < 50W) |
| Form Factor | VME 6U / PCB |
| Dimensions | TBD (Standard VME 6U) |
| Weight | TBD |
| Interface(s) | Multiple Digital I/O, Interlock Signals, VME Bus |
| Connector(s) | D-Sub (DB-25, DB-50), VME P1/P2 Connectors |
| Function | Safety Interlock Monitoring & Control, Node Safety Logic |
| Isolation | Opto-isolated Inputs/Outputs |
| Operating Temp. | 0°C to +55°C (Industrial) |
| Storage Temp. | -40°C to +85°C |
| Humidity | 5% – 95% (Non-condensing) |
| Certifications | CE, SEMI S2 |
| Applications | Semiconductor Etch/DPS Systems, Equipment Safety Interlock |
| Country of Origin | United States |
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